MEMS Fabrication Facility
Lithography
Etching (Dry & Wet)
Lithography
Spin coater
Mask Aligner (Double-sided)
Mask Writer
Wafer Bonder
Deposition
Etching (Dry & Wet)
Lithography
LPCVD
PECVD
Sputter
Vapour Deposition
E-Beam Deposition
Thermal Evaporator
Etching (Dry & Wet)
Etching (Dry & Wet)
Etching (Dry & Wet)
DRIE
RIE
Vapour-HF
KOH
Acid, Solvent
Fabrication Capability
Characterization Capability
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