YOUR TECHNOLOGY PARTNER FOR MEMS & MICROFLUIDICS

MEMS Fabrication Facility

Lithography

Etching (Dry & Wet)

Lithography

Spin coater

Mask Aligner (Double-sided)

Mask Writer

Wafer Bonder

Deposition

Etching (Dry & Wet)

Lithography

LPCVD

PECVD

Sputter

Vapour Deposition

E-Beam Deposition

Thermal Evaporator

Etching (Dry & Wet)

DRIE

RIE

Vapour-HF

KOH

Acid, Solvent

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